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Low cost MFC control unit using microcontoller

In this paper we present a compact and low cost solution to set up and to monitor an electronic Mass Flow Controller (MFC) using an Arduino microcontroller. Usually, MFCs can find a great demand at materials science laboratories, mainly in techniques which requires  a precise gas flow control, such...

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Principais autores: Espindola, Paulo R, Aquino, Mariana L, Cena, Cicero R, Alves, Diego C B, Reis, Diogo D, Goncalves, Alem-Mar B
Formato: Artigo
Idioma: Português
Publicado em: Universidade Tecnológica Federal do Paraná (UTFPR) 2017
Acesso em linha: http://periodicos.utfpr.edu.br/rbfta/article/view/5581
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spelling peri-article-55812019-12-02T13:21:05Z Low cost MFC control unit using microcontoller Espindola, Paulo R Aquino, Mariana L Cena, Cicero R Alves, Diego C B Reis, Diogo D Goncalves, Alem-Mar B Física, Física Aplicada, Instrumentação MFC; Low cost control; microcontroller; Arduino; gas flux. In this paper we present a compact and low cost solution to set up and to monitor an electronic Mass Flow Controller (MFC) using an Arduino microcontroller. Usually, MFCs can find a great demand at materials science laboratories, mainly in techniques which requires  a precise gas flow control, such as synthesis of thin films by Chemical Vapor Deposition (CVD). The control unit produced is presented in details by using schematic diagrams of the circuit and a detailed configuration for connect the controller to the MFC are presented. The control unit is also capable to work with two Mass Flow Controllers (MFCs) simultaneously at manual and remote (via computer software) regime. The source code is quite simple and allows the user easily modify parameters as type of gas and flux capacity of the controllers. Although the low resolution of ADC (Analog-to-Digital Converter) (10 bits) and DAC (Digital-to-Analog Converter) (using PWM - “Pulse Width Modulation”, 8 bits), the flux can be adjusted in steps of 0.4 % and 1.5 % of the total flux, respectively, which is very satisfactory for practical purposes. Finally, the operation tests were taken by using Argon (Ar) gas, and great accordance between the set point flow and the MFC measured flow was found. Universidade Tecnológica Federal do Paraná (UTFPR) CNPq 2017-12-01 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion application/pdf http://periodicos.utfpr.edu.br/rbfta/article/view/5581 10.3895/rbfta.v4n2.5581 Revista Brasileira de Física Tecnológica Aplicada; v. 4, n. 2 (2017) 2358-0089 10.3895/rbfta.v4n2 por http://periodicos.utfpr.edu.br/rbfta/article/view/5581/4620 Direitos autorais 2017 CC-BY http://creativecommons.org/licenses/by/4.0
institution Universidade Tecnológica Federal do Paraná
collection PERI
language Português
format Artigo
author Espindola, Paulo R
Aquino, Mariana L
Cena, Cicero R
Alves, Diego C B
Reis, Diogo D
Goncalves, Alem-Mar B
spellingShingle Espindola, Paulo R
Aquino, Mariana L
Cena, Cicero R
Alves, Diego C B
Reis, Diogo D
Goncalves, Alem-Mar B
Low cost MFC control unit using microcontoller
author_sort Espindola, Paulo R
title Low cost MFC control unit using microcontoller
title_short Low cost MFC control unit using microcontoller
title_full Low cost MFC control unit using microcontoller
title_fullStr Low cost MFC control unit using microcontoller
title_full_unstemmed Low cost MFC control unit using microcontoller
title_sort low cost mfc control unit using microcontoller
description In this paper we present a compact and low cost solution to set up and to monitor an electronic Mass Flow Controller (MFC) using an Arduino microcontroller. Usually, MFCs can find a great demand at materials science laboratories, mainly in techniques which requires  a precise gas flow control, such as synthesis of thin films by Chemical Vapor Deposition (CVD). The control unit produced is presented in details by using schematic diagrams of the circuit and a detailed configuration for connect the controller to the MFC are presented. The control unit is also capable to work with two Mass Flow Controllers (MFCs) simultaneously at manual and remote (via computer software) regime. The source code is quite simple and allows the user easily modify parameters as type of gas and flux capacity of the controllers. Although the low resolution of ADC (Analog-to-Digital Converter) (10 bits) and DAC (Digital-to-Analog Converter) (using PWM - “Pulse Width Modulation”, 8 bits), the flux can be adjusted in steps of 0.4 % and 1.5 % of the total flux, respectively, which is very satisfactory for practical purposes. Finally, the operation tests were taken by using Argon (Ar) gas, and great accordance between the set point flow and the MFC measured flow was found.
publisher Universidade Tecnológica Federal do Paraná (UTFPR)
publishDate 2017
url http://periodicos.utfpr.edu.br/rbfta/article/view/5581
_version_ 1805449338014400512
score 10,814766

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